About - SEM AB
About - SEM AB
Jun 17, 2024
sem.se
4D STEM operating principle on Make a GIF
4D STEM operating principle on Make a GIF
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A guide to SEM analysis procedures
A guide to SEM analysis procedures
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46 reactions · 3 comments | Serial block-face scanning electron...
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46 reactions · 3 comments | Serial block-face scanning electron...
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A TEM lamella of an SRAM was prepared using a FIB-SEM. The lamella was thinned down to a thickness of 50 nm and various STEM images were observed on the FIB-SEM equipped with a STEM detector. BF-STEM image shows the crystal structure of Poly-Si region and surrounding structures. MADDF-STEM image highlights the barrier metal around the W plug. HAADF-STEM image provides Z-contrast according to the average atomic number. Several nm thick gate oxide layer was clearly observed at higher magnification
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A TEM lamella of an SRAM was prepared using a FIB-SEM. The la…
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Scanning electron microscopy (SEM)
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