Abstract: As a steerable needle or robotic manipulator, the concentric-tube robot shows good potential for use in minimally invasive medical procedures. However, the torsional deformation of the ...
Elimination of Pinhole Defects in Self-Aligned Double Patterning Process by using Bias Pulsed Plasma
Abstract: Self-aligned double patterning (SADP) is extensively utilized in advanced sub-20nm technology nodes. The DRAM digit contact SADP dry etch process experienced severe yield loss due to pinhole ...
Body patterning defines the processes occurring during early animal development that determine the animal’s basic body plan and direct morphogenesis. Body patterning ensures that the correct cell ...
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